Complete filling of 41 nm trench pattern using Cu seed layer deposited by SAM-modified electroless plating and electron-beam evaporation

To overcome the limitation of the sputtered Cu seed layer in electroplating of Cu interconnects imposed by the shadow effect, a new method for depositing a Cu seed layer on a 41 nm trench pattern based on combination of electroless plating (ELP) and electron-beam (E-Beam) evaporation was developed. A Cu seed layer formed by ELP alone was too thin to be used for electroplating due to its high resistivity. To solve this problem, an additional Cu layer was deposited on top of the trench by E-Beam evaporator to enhance the electrical conductivity of the Cu seed layer. The electrical resistivity of the resulting Cu layer was reduced to 4.8 μΩ cm, which was sufficient for the conductive seed layer for electroplating the 41 nm trench pattern. The gap-filling capability also improved and there were no voids or seams in the 41 nm trench pattern. The proposed method can be an effective solution for fabrication of a conductive seed layer to fill a 41 nm trench pattern by electroplating.     

Numerical study of the adsorption of dyes from textile effluents

The textile industry is one of the greatest generators of liquid effluents, due to the high quantities of water used in the dyeing process. Fixed bed adsorption columns using activated carbon have been widely used in industrial processes for the removal of contaminants from textile effluents. In this study we present the modelling of an adsorption process applied to textile dyes, using fixed bed columns. This model permits the prediction of the dye concentration at the adsorption column outlet, considering the influence of various operational parameters. The adsorption isotherms of the dye Basic Green 4, over granular activated carbon at 25 °C in an aqueous solution, were determined experimentally through a comprehensive series of tests. The Langmuir and Radke–Prausnitz models gave the best results for the adsorption isotherms. Tests were carried out in fixed bed columns to determine the breakthrough curves, with variations in feed rate, feed concentration, diameter of the column and mass transfer coefficient. The experimental conditions were simulated using a transient mathematical model. The data obtained numerically and experimentally were compared to validate the mathematical model proposed.     

Phenomenology of a formation of a honeycomb-like structure during copper electrodeposition

In this paper, the phenomenology of a formation of a honeycomb-like structure was considered. Copper deposits obtained at overpotential of 1000 mV were examined by scanning electron microscopy (SEM) technique. It was shown that two groups of craters or holes were formed by the electrodeposition at this overpotential. The origin of one group is associated with hydrogen evolution and the attachment of hydrogen bubbles at the surface area of an electrode. For the origin of the other group, a current distribution at the growing surface was very important. The effect of preparing a working electrode onto the formation of a honeycomb-like structure is also considered.     

Application of wet effluent diffusion denuder for measurement of uptake coefficient of gaseous pollutants

The comparison of theoretical approaches describing the collection of analyte in the cylindrical wet effluent diffusion denuder (CWEDD) with experimental data is presented. Various absorption liquids were tested for the collection of formaldehyde (distilled-deionized water, H₂SO₄ solution), acetaldehyde (distilled-deionized water) and nitrous acid (distilled-deionized water, sodium carbonate and sodium bicarbonate solutions of various concentrations and sodium phosphate pH 6-8) in CWEDD. pH of absorption liquids significantly influences the collection of formaldehyde as well as nitrous acid. The collection efficiency of formaldehyde for 0.05 M H₂SO₄ as absorption liquid was generally higher than for distilled-deionized water. Absorption liquid pH markedly affected the collection efficiency of HONO too (with increasing pH the collection efficiency increase). Data derived by Gormley-Kennedy equation for all investigated compounds were overestimated especially for higher flow rates of air, data calculated with respect to Henry constant are not in good agreement with experimental data and are considerably depended on a determination of the Henry constant value. The CWEDD can be alternative tool for the determination of uptake coefficient. Obtained uptake coefficients were in good agreement with data found in other literature.     

The characteristics of chromized 1020 steel with electrical discharge machining and Ni electroplating pretreatments

A uniform and continuous chromized coating on AISI 1020 steel is produced by low-temperature pack chromization (LTPC) with electrical discharge machining and Ni electroplating pretreatments. The anticorrosive performance of the chromized steels is investigated in a 0.5 M H₂SO₄ solution at room temperature. The testing results indicate that the chromized specimen with electrical discharge machining and Ni electroplating pretreatments exhibits the lowest corrosion current density, 2.16 × 10⁻⁸ A cm⁻², among the tested specimens. The corrosion resistance of all tested specimens are in the order of bare 1020 < 1020-Cr(700-2) < 1020-Ni-Cr(700-2) < 1020-EDM-Ni-Cr(700-2). Moreover, the 1020-Ni-Cr(700-2) specimen have the best conductivity as a result of the less amount of oxides in the superficial coating.     

Synergistic effect of ultrasonic pre-treatment combined with UV irradiation for secondary effluent disinfection

The ultraviolet (UV) disinfection efficiency is often affected by suspended solids (SS). Given their high concentration or large particle size, SS can scatter UV light and provide shielding for bacteria. Thus, ultrasound is often employed as a pre-treatment process to improve UV disinfection. This work investigated the synergistic effect of ultrasound combined with UV for secondary effluent disinfection. Bench-scale experiments were conducted in using samples obtained from secondary sedimentation tanks. These tanks belonged to three wastewater treatment plants in Beijing that use different kinds of biological treatment methods. Several parameters may contribute to the changes in the efficiency of ultrasound and UV disinfection. Thus, the frequency and energy density of ultrasound, as well as the SS, were investigated. Results demonstrated that samples which have relatively higher SS concentrations or higher percentages of larger particles have less disinfection efficiency using UV disinfection alone. However, the presence of ultrasound could improve the disinfection efficiency because it has synergistic effect. Changes in the particle size distribution and SS concentration notably affected the efficiency of UV disinfection. The efficiency of Escherichia coli elimination can be decreased by 1.2 log units as the SS concentration increases from 16.9 mg/l to 25.4 mg/l at a UV energy density of 40 mJ/cm². UV disinfection alone reduced the E. coli population by 3.4 log units. However, the synergistic disinfection of ultrasound and UV could reach 5.4 log units during the reduction of E. coli at a 40 kHz frequency and an energy density of 2.64 kJ/l. The additional synergistic effect is 1.1 log units.     

Robust High Temperature Sensor Probe Based on a Ni-coated Fiber Bragg Grating

A robust high temperature sensor probe based on a Ni-coated fiber Bragg grating（FBG） was fabricated by Ni electroplating of femtosecond laser written FBG. The probe can resist high temperature up to 800℃ with a high sensitivity of 32.2 pm/℃. It also has a good mechanical strength even after high temperature annealing. The thermal strain of the probe was simulated by the finite element method（FEM）. The Bragg resonant wavelength shift with temperature and its sensitivity change with the thickness of the Ni-coated layer were also calculated.     

A solution for cyclic scheduling of multi-hoists without overlapping

In this paper, we study the cyclic scheduling problem for electroplating lines where products are loaded into the system at one end and unloaded at the other end. The electroplating jobs must be processed within a given time window in each tank. There is no buffer between tanks. Two hoists sharing a common track are used to move products between the tanks in the production line. The objective is to minimize the production cycle time through scheduling hoist moves. A solution procedure is proposed in this study. The production line is first divided into two non-overlapping zones with a hoist assigned to each zone. Then a mixed integer linear programming model is developed for scheduling hoist moves. Computational results on a benchmark example problem are given in the paper to demonstrate the application of the proposed method.     

CN--Ag+-OCDAA体系测定电镀废水中微量CN-的研究

研究建立了以CN--Ag -OCDAA体系分光光度测定微量CN-的新方法。该法表观摩尔吸光系数为8.2×104L·mol-1·cm-1,CN-在0—9μg/50mL浓度范围内遵守比耳定律。用于电镀废水中CN-的测定,结果令人满意。     

3D-EEMs和PARAFAC解析土壤渗滤处理污水厂二级出水研究

利用三维荧光光谱（3D-EEMs）和平行因子分析（PARAFAC）的方法研究了土壤渗滤处理污水厂二级出水中氮、磷及溶解性有机物（DOM）的垂直分布特征。试验在一个中试规模的土壤渗滤系统中进行,反应器自上而下每隔30 cm设置一个采样口,采集的样品通过PARAFAC识别出系统不同点位的DOM具有4个荧光组分,包括2个类腐殖质物质（C1,C2）、2个类蛋白物质（C3,C4）。对荧光组分浓度得分F_max分析得出,C4代表的类色氨酸比其他3类物质更易于降解,即类色氨酸最易降解,其次为类富里酸、类胡敏酸类物质、类蛋白物质。四种组分的F_max变化幅度都以在0~30 cm处最大,表明此处生化反应最为剧烈,DOM的迁移转化速率最大。运用PARAFAC、主成分分析（PCA）和聚类分析（CA）等手段,可以揭示土壤渗滤系统中DOM的来源和不同深度的变化规律。土壤渗滤系统在4 L·d-1的低负荷条件下处理污水处理厂二级出水,对TN和NO3-N的去除是不利的,后续可以耦合反硝化滤池等工艺强化反硝化脱氮,进一步提高氮素的去除率。土壤对磷的吸附尚未达到饱和的状态,保持了较高的TP去除效率。